Title: Selective self-assembled monolayer coating to enable Cu-to-Cu connectionin dual damascene vias
Authors: Maestre Caro, Arantxa ×
Travaly, Youssef
Beyer, Gerald
Tokei, Zsolt
Maes, Guido
Borghs, Gustaaf
Armini, Silvia #
Issue Date: Jun-2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:106 pages:76-80
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
Semiconductor Physics Section
× corresponding author
# (joint) last author

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