Title: Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon
Authors: Koelling, Sebastian
Richard, Olivier
Bender, Hugo
Uematsu, M
Schulze, Andreas
Zschaetzsch, Gerd
Gilbert, Matthieu
Vandervorst, Wilfried
Issue Date: 2013
Publisher: American Chemical Society
Series Title: Nano Letters vol:13 issue:6 pages:2458-2462
ISSN: 1530-6984
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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