Title: RTN assessment of traps in polysilicon cylindrical vertical FETs for NVM application
Authors: Caño de Andrade, Maria Gloria
Toledano Luque, Maria
Fourati, Fatma
Degraeve, Robin
Martino, Joao Antonio
Claeys, Cor
Simoen, Eddy
Van den Bosch, Geert
Van Houdt, Jan
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:109 pages:105-108
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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