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Title: Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness
Authors: Van den Berg, Jaap
Reading, Michael
Bailey, Paul
Noakes, Tim
Adelmann, Christoph
Popovici, Mihaela Ioana
Tielens, Hilde
Conard, Thierry
De Gendt, Stefan
Van Elshocht, Sven
Issue Date: 2013
Publisher: New York
Series Title: Applied Surface Science vol:281 pages:8-16
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis

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