Title: Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography
Authors: Kambham, Ajay Kumar
Kumar, Arul
Florakis, Antonios
Vandervorst, Wilfried
Issue Date: 2013
Publisher: IOP Pub.
Series Title: Nanotechnology vol:24 issue:22 pages:2755705
ISSN: 0957-4484
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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