ITEM METADATA RECORD
Title: ALD growth behavior of high-k nanolayers on various substrates characterized by X-Ray Spectrometry in gracing incidence geometry
Authors: Müller, Matthias
Sioncke, Sonja
Delabie, Annelies
Beckhoff, Burkhard
Issue Date: 2013
Publisher: Trans Tech Publications
Host Document: Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS pages:95-97
Conference: Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS location:Gent Belgium date:17/09/2012
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications

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