|ITEM METADATA RECORD
|Title: ||ALD growth behavior of high-k nanolayers on various substrates characterized by X-Ray Spectrometry in gracing incidence geometry|
|Authors: ||Müller, Matthias|
|Issue Date: ||2013 |
|Publisher: ||Trans Tech Publications|
|Host Document: ||Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS pages:95-97|
|Conference: ||Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS location:Gent Belgium date:17/09/2012|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Non-KU Leuven Association publications|
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