Title: Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams
Authors: Uedono, A
Kirimura, T
Wilson, Chris
Croes, Kristof
Demuynck, Steven
Tokei, Zsolt
Oshima, N
Suzuki, R
Issue Date: 2013
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:114 issue:7 pages:74510
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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