Advanced Etch Technology for Nanopatterning II, Date: 2013/01/24 - 2013/01/02, Location: San Jose, CA USA
Publication date:
2013-01-01
Volume:
8685
Pages:
86850 -
DOI:
10.1117/12.2013602
Publisher:
Society of Photo-optical Instrumentation Engineers
Advanced Etch Technology for Nanopatterning II
Author:
Boullart, Werner
Radisic, Dunja ; Paraschiv, Vasile ; Cornelissen, Sven ; Manfrini, Mauricio ; yatsuda, koichi ; Nishimura, Eiichi ; Ohishi, Tetsuya ; Tahara, Shigeru
Keywords:
Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Engineering, Science & Technology - Other Topics, MAGNETIC TUNNEL-JUNCTION, ETCH CHARACTERISTICS, 4006 Communications engineering, 4009 Electronics, sensors and digital hardware, 5102 Atomic, molecular and optical physics