Title: 2D and 3D photoresist line roughness characterization
Authors: Vaglio Pret, Alessandro
Kunnen, Eddy
Gronheid, Roel
Pargon, Erwine
Luere, Olivier
Bianchi, Davide
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:110 pages:100-107
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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