Title: Charge retention in a patterned SiO2/Si3N4 electret
Authors: Leonov, Vladimir
van Schaijk, Rob
Van Hoof, Chris
Issue Date: 2013
Publisher: IEEE Sensors Council
Series Title: IEEE Sensors Journal vol:13 issue:9 pages:3369-3376
ISSN: 1530-437X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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