Title: Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors
Authors: Lee, Jae Woo
Sasaki, Yuichiro
Cho, Moon Ju
Boccardi, Guillaume
Ritzenthaler, Romain
Eneman, Geert
Chiarella, Thomas
Brus, Stephan
Horiguchi, Naoto
Groeseneken, Guido
Thean, Aaron
Issue Date: 2013
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:102 issue:22 pages:223508
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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