|ITEM METADATA RECORD
|Title: ||Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fab|
|Authors: ||Marcon, Denis|
De Jaeger, Brice
Van Hove, Marleen
|Issue Date: ||2013 |
|Publisher: ||Institute of Electrical and Electronics Engineers|
|Series Title: ||IEEE Transactions on Semiconductor Manufacturing vol:26 issue:3 pages:361-367|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Supporting Services Campusmanagement Science, Engineering and Technology|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science