Title: Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fab
Authors: Marcon, Denis
De Jaeger, Brice
Halder, Sandip
Vranckx, Nick
Mannaert, Geert
Van Hove, Marleen
Decoutere, Stefaan
Issue Date: 2013
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Semiconductor Manufacturing vol:26 issue:3 pages:361-367
ISSN: 0894-6507
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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