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Title: Statistical characterization of vertical poly-Si channel using charge pumping technique for 3D flash memory optimization
Authors: Tang, Baojun
Toledano Luque, Maria
Zhang, W.D
Van den Bosch, Geert
Degraeve, Robin
Zhang, J.F
Van Houdt, Jan
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:109 pages:39-42
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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