Title: Chemisorption of ALD precursors in and on porous low-k films
Authors: Verdonck, Patrick
Delabie, Annelies
Swerts, Johan
Farrell, Leo
Baklanov, Mikhaïl
Tielens, Hilde
Van Besien, Els
Witters, Thomas
Nyns, Laura
Van Elshocht, Sven
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:106 pages:81-84
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science