Title: Si cap passivation for Ge nMOS applications
Authors: Sioncke, Sonja
Vanherle, Wendy
Art, Wim
Ceuppens, Joris
Ivanov, Tsvetan
Lin, Dennis
Nyns, Laura
Delabie, Annelies
Conard, Thierry
Struyf, Herbert
De Gendt, Stefan
Caymax, Matty
Collaert, Nadine
Thean, Aaron
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:109 pages:46-49
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Quantum Chemistry and Physical Chemistry Section
Molecular Design and Synthesis

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