Title: Precuring implant photoresists for shrink and patterning control
Authors: Winroth, Gustaf
Rosseel, Erik
Delvaux, Christie
Altamirano Sanchez, Efrain
Ercken, Monique
Issue Date: 2013
Publisher: SPIE-The International Society for Optical Engineering
Series Title: Journal of Microlithography, Microfabrication and Microsystems vol:12 issue:4 pages:41303
ISSN: 1537-1646
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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