Title: Full reliability study of advanced metallization options for 30 nm ½pitch interconnects
Authors: Croes, Kristof
Demuynck, Steven
Siew, Yong Kong
Pantouvaki, Marianna
Wilson, Chris
Heylen, Nancy
Beyer, Gerald
Tokei, Zsolt
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:106 pages:210-213
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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