Title: Roughness evolution during the atomic layer deposition of metal oxides
Authors: Peter, Antony
Delabie, Annelies
Rodriguez, Leonard
Moussa, Alain
Adelmann, Christoph
Issue Date: 2013
Publisher: Published by AVS through the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:6 issue:31 pages:61501
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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