Title: Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
Authors: Rusu, C ×
Jansen, H
Gunn, R
Witvrouw, Ann #
Issue Date: 2003
Publisher: IEEE
Host Document: DTIP 2003:Design, Test, Integration and Packaging of MEMS/MOEMS 2003 pages:245-250
Conference: Symposium on Design, Test, Integratives and Packaging of MEMS/MOEMS location:Cannes, France date:May 05-07, 2003
ISBN: 0-7803-7066-X
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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