Title: Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
Authors: Stahl, H ×
Hoechst, A
Fischer, F
Metzger, L
Reichenbach, R
Laermer, F
Kronmueller, S
Breitschwerdt, K
Gunn, R
Watcham, S
Rusu, C
Witvrouw, Ann #
Issue Date: 2003
Publisher: IEEE
Host Document: Transducers'03: Digest of Technical Papers, Vols 1 and 2 pages:1899-1902
Conference: 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 03) location:Boston, USA date:Jun 08-12, 2003
ISBN: 0-7803-7731-1
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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