Title: Development, Optimization and Evaluation of a CF4 Pre-treatment Process to Remove Unwanted Interfacial Layers in Stacks of CVD and PECVD Polycrystalline Silicon-Germanium for MEMS Applications
Authors: Bryce, George ×
Severi, Simone
van Hoof, Rita
Guo, Bin
Kunnen, Eddy
Witvrouw, Ann
Decoutere, Stefaan #
Issue Date: 2010
Publisher: Electrochemical Society, Inc
Host Document: Electrochemical Society Transactions - ECS Transactions vol:28 issue:20 pages:79-90
Conference: Symposium on Sensors, Actuators, and Microsystems General Session held during the 217th Meeting of the Electrochemical-Society (ECS) location:Vancouver, Canada date:Apr 25-30, 2010
ISBN: 978-1-60768-196-0
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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