Title: Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS
Authors: Mehta, A ×
Gromova, Maria
Czarnecki, Piotr
Baert, Kris
Witvrouw, Ann #
Issue Date: 2005
Publisher: IEEE
Host Document: Transducers '05, Digest of Technical Papers, Vols 1 and 2 pages:1326-1329
Conference: 13th International Conference on Solid-State Sensors, Actuators and Microsystems location:Seoul, South Korea date:Jun 05-09 2005
ISBN: 0-7803-8994-8
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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