Title: SIGEM, low-temperature deposition of Poly-SiGe MEMs structures on standard CMOS circuits
Authors: Ramos-Martos, J ×
Ceballos-Caceres, J
Ragel-Morales, A
Mora-Gutierrez, JM
Arias-Drake, A
Lagos-Florido, MA
Munoz-Hinojosa, JM
Mehta, A
Verbist, A
du Bois, B
Kehr, K
Leinenbach, C
Van Aerde, S
Spengler, J
Witvrouw, Ann #
Issue Date: 2005
Publisher: SPIE- Int Soc Optical Engineering
Host Document: Smart Sensors, Actuators, and MEMS II vol:5836 pages:293-306
Conference: Conference Sensors, Actuators, and MEMS II location:Seville, Spain date:May 09-11, 2005
ISBN: 0-8194-5831-7
ISSN: 0277-786X
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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