Title: Highly reliable and extremely stable SiGe micro-mirrors
Authors: Gromova, M
Haspeslagh, L
Verbist, A
Du Bois, B
Van Hoof, R
Eyckens, B
Sijmus, B
De Wolf, I
Simons, V
Muller, Ph
Lauwagie, T
Willegems, M
Locorotondo, S
Boullart, W
Baert, Kris
Witvrouw, Ann
Issue Date: 2007
Publisher: IEEE
Host Document: Proceedings MEMS, Vols 1 And 2 pages:759-762
Conference: 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) location:Kobe, Japan date:Jan 21-25, 2007
ISBN: 978-1-4244-0950-1
ISSN: 1084-6999
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
ESAT - ELECTA, Electrical Energy Computer Architectures

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