Title: Investigation of intrinsic stress effects in cantilever structures
Authors: Hollauer, Ch ×
Ceric, H
Van Barel, G
Witvrouw, Ann
Selberherr, S #
Issue Date: 2007
Publisher: IEEE
Host Document: 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3 pages:151-154
Conference: IEEE International Conference of Nano/Micro Engineered and Molecular Systems location:Bangkok, Thailand date:Jan 16-19, 2007
ISBN: 978-1-4244-0609-8
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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