Title: Micromachining of pulsed laser annealed PECVD SixGe1-x deposited at temperatures <= 370 degrees C
Authors: Sedky, S ×
Witvrouw, Ann #
Issue Date: 2005
Publisher: IEEE
Host Document: Proc IEEE MEMS 2005 pages:487-490
Conference: 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) location:Miami Beach, USA date:Jan 30-Feb 03, 2005
ISBN: 0-7803-8732-5
ISSN: 1084-6999
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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