Title: Apparent and steady-state etch rates in thin film etching and under-etching of microstructures: II. Characterization
Authors: Van Barel, Gregory ×
Du Bois, Bert
Van Hoof, Rita
De Wachter, Jef
De Ceuninck, Ward
Witvrouw, Ann #
Issue Date: 2010
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:20 issue:5
Article number: 055034
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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