Title: SiGe based grating light valves: A leap towards monolithic integration of MOEMS
Authors: Rudra, S ×
Roels, J
Bryce, G
Haspeslagh, L
Witvrouw, Ann
Van Thourhout, D #
Issue Date: 2010
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:87 issue:5-8 pages:1195-1197
Conference: 35th International Conference on Micro-and Nano-Engineering location:Ghent: BELGIUM date:SEP 28-OCT 01, 2009
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science