Title: Novel micromirror design with variable pull-in voltage
Authors: Beernaert, Roel ×
Podprocky, Tomas
De Coster, Jeroen
Witvrouw, Ann
Haspeslagh, Luc
Avci, Aykut
De Smet, Jelle
De Smet, Herbert #
Issue Date: 2010
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:87 issue:5-8 pages:1248-1252
Conference: 35th International Conference on Micro-and Nano-Engineering location:Ghent, Belgium date:Sep 28-Oct 01, 2009
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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