Title: Ultra-high density MEMS probe memory device
Authors: Heck, John ×
Adams, Donald
Belov, Nickolai
Chou, Tsung-Kuan A
Kim, Byong
Kornelsen, Kevin
Ma, Qing
Rao, Valluri
Severi, Simone
Spicer, Dean
Tchelepi, Ghassan
Witvrouw, Ann #
Issue Date: 2010
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:87 issue:5-8 pages:1198-1203
Conference: 35th International Conference on Micro-and Nano-Engineering location:Ghent: BELGIUM date:SEP 28-OCT 01, 2009
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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