Title: Poly SiGe, a promising material for MEMS post-processing on top of standard CMOS wafers
Authors: Sedky, S ×
Witvrouw, Ann
Baert, Kris #
Issue Date: 2001
Publisher: Springer-Verlag Berlin
Host Document: Transducers '01: Eurosensors XV, Digest of Technical Papers, Vols 1 and 2 pages:988-991
Conference: 11th International Conference on Solid-State Sensors and Actuators location:Munich, Germany date:Jun 10-14, 2001
ISBN: 3-540-42150-5
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science