Title: The effect of the passivation material on the stress and stress relaxation behaviour of narrow Al-Si-Cu lines
Authors: Witvrouw, Ann ×
Flinn, P
Maex, Karen #
Issue Date: 1997
Publisher: MRS
Host Document: MRS Proceedings- Thin Films: Stresses and Mechanical Properties VI vol:436 pages:449-454
Conference: Symposium on Thin Films - Stresses and Mechanical Properties VI, at the 1996 MRS Spring Meeting location:San Fransisco, USA date:Apr 08-12, 1996
ISBN: 1-55899-339-8
ISSN: 0272-9172
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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