Title: Planarization of deep trenches
Authors: Rusu, C ×
Klaasse, G
Sedky, S
Esch, Heleen
Parmentier, B
Verbist, A
Witvrouw, Ann #
Issue Date: 2001
Publisher: SPIE-Int Soc Optical Engineering
Host Document: Proc SPIE - Micromachining and Microfabrication Process Technology vol:4557 pages:49-57
Conference: Micromachining and Microfabrication Process Technology VII Conference location:San Fransisco, USA date:Oct 22-24, 2001
ISBN: 0-8194-4285-2
ISSN: 0277-786X
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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