ITEM METADATA RECORD
Title: Design of SiGe Nano-Electromechanical Relays for Logic Applications
Authors: Rochus, V ×
Ramezani, Maliheh
Cosemans, S
Severi, S
Witvrouw, Ann
De Meyer, Kristin
Tilmans, H. A. C
Rottenberg, X #
Issue Date: 2013
Publisher: IEEE
Host Document: 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EUROSIME)
Conference: 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) location:Wroclaw, Poland date:Apr. 14-17, 2013
Article number: Proc EuroSimE 2013: CD-ROM full version (IEEE Catalog number CFP13566-CDR, ISBN 978-1-4673-6137-8)
ISBN: 978-1-4673-6139-2
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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