Title: Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications
Authors: Gromova, Maria ×
Mehta, A
Baert, K
Witvrouw, Ann #
Issue Date: 2006
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:130 pages:403-410
Conference: 13th International Conference on Solid-State Sensors, Actuators and Microsystems location:Seoul: SOUTH KOREA date:JUN 05-09, 2005
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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