Title: Chemical kinetics of the hydrogen-GePb1 defect interaction at the (100)GexSi1-x/SiO2 interface
Authors: Nguyen Hoang Thoan ×
Stesmans, Andre
Anh Phuc Duc Nguyen
Keunen, Koen
Afanas'ev, Valeri #
Issue Date: 1-Jan-2013
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:31 issue:1 pages:010603-1-010603-6
Article number: 010603
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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