Title: Electron spin resonance analysis of sputtering-induced defects in advanced low-kappa insulators (kappa=2.0-2.5)
Authors: Stesmans, Andre ×
Nguyen, A. P. D
Houssa, Michel
Afanas'ev, Valeri
Tokei, Zs
Baklanov, M. R #
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:109 pages:240-243
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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