Title: A perturbation method for the 3D finite element modeling of electrostatically driven MEMS
Authors: Boutaayamou, Mohamed ×
Sabariego, Ruth
Dular, Patrick #
Issue Date: 2008
Publisher: Molecular Diversity Preservation International (MDPI)
Series Title: Sensors vol:8 issue:2 pages:994-1003
Abstract: In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing regions are close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub­problems in reduced domains and consequently of benefiting from different problem­adapted meshes. This approach allows for computational efficiency by decreasing the size of the problem.
ISSN: 1424-8220
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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