Title: Finite element modeling of electrostatic MEMS including the impact of fringing field effects on forces
Authors: Boutaayamou, Mohamed ×
Sabariego, Ruth
Dular, Patrick #
Issue Date: 2008
Publisher: American Scientific Publishers
Series Title: Sensor Letters vol:6 issue:1 pages:115-120
Abstract: The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking fringing fields into account is crucial for an accurate com- putation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accurate computation of electrostatic forces and capacitances is shown through 2D and 3D parametric studies.
ISSN: 1546-198X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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