Title: An EpoClad/EpoCore-based platform for MOEMS fabrication
Authors: Guan, Tiannan ×
Ceyssens, Frederik
Puers, Bob #
Issue Date: 30-Oct-2013
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:23 issue:12
Article number: 125005
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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