Title: A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
Authors: Rudra, S ×
Van Hoof, R
De Coster, J
Bryce, G
Severi, S
Witvrouw, Ann
Van Thourhout, D #
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:105 pages:8-12
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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