Title: Multi-response optimization of ultrathin poly-SiGe films characteristics for Nano-ElectroMechanical Systems (NEMS) using the grey-Taguchi technique
Authors: Asafa, T. B ×
Bryce, G
Severi, S
Said, S. A. M
Witvrouw, Ann #
Issue Date: 2013
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:111 pages:229-233
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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