|ITEM METADATA RECORD
|Title: ||Evaluation of high-speed linear air-knife based wafer dryer|
|Authors: ||Tamaddon, Amir-Hossein|
|Issue Date: ||2012 |
|Conference: ||11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS location:Gent Belgium date:16/09/2012|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Surface and Interface Engineered Materials|
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