Title: Evaluation of high-speed linear air-knife based wafer dryer
Authors: Tamaddon, Amir-Hossein
Belmiloud, Naser
Doumen, Geert
Struyf, Herbert
Mertens, Paul
Heyns, Marc
Issue Date: 2012
Conference: 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS location:Gent Belgium date:16/09/2012
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Surface and Interface Engineered Materials

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