Title: Critical material properties for pattern collapse mitigation
Authors: Winroth, Gustaf
Younkin, Todd R
Blackwell, James M
Gronheid, Roel
Issue Date: 2012
Publisher: SPIE-The International Society for Optical Engineering
Series Title: Journal of Microlithography, Microfabrication and Microsystems vol:11 issue:3 pages:33004
ISSN: 1537-1646
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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