ITEM METADATA RECORD
Title: Critical material properties for pattern collapse mitigation
Authors: Winroth, Gustaf
Younkin, Todd R
Blackwell, James M
Gronheid, Roel
Issue Date: 2012
Publisher: SPIE-The International Society for Optical Engineering
Series Title: Journal of Microlithography, Microfabrication and Microsystems vol:11 issue:3 pages:33004
ISSN: 1537-1646
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science