Title: Compositional depth profiling of TaCN thin films
Authors: Adelmann, Christoph
Conard, Thierry
Franquet, Alexis
Brijs, Bert
Munnik, Frans
Burgess, Simon
Witters, Thomas
Meersschaut, Johan
Kittl, Jorge
Vandervorst, Wilfried
Van Elshocht, Sven
Issue Date: 2012
Publisher: Published by AVS through the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:30 issue:4 pages:41510
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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