Title: Improved surface cleaning by in-situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells
Authors: Granata, Stefano
Bearda, Twan
Dross, Frederic
Gordon, Ivan
Poortmans, Jef
Mertens, Robert
Issue Date: 2012
Publisher: IMEC
Conference: 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS location:Gent Belgium date:16/09/2012
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures

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