ITEM METADATA RECORD
Title: Comparison of three methods to measure the internal pressure of empty MEMS packages
Authors: Wang, Bo ×
Tanaka, Shuji
De Coster, Jeroen
Severi, Simone
Witvrouw, Ann
Wevers, Martine
De Wolf, Ingrid #
Issue Date: 2012
Host Document: IPFA 2012, 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits pages:1-4
Conference: IPFA 2012, IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits edition:19 location:Singapore date:July 2 2012
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
Physics and Astronomy - miscellaneous
× corresponding author
# (joint) last author

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