Title: Evidence of speckle in extreme-UV lithography
Authors: Vaglio Pret, Alessandro
Gronheid, Roel
Engelen, Jan
Pei-Yang, Yan
Leeson, Michael
Younkin, Todd
Issue Date: Oct-2012
Publisher: Optical Society of America
Series Title: Optics Express vol:20 issue:23 pages:25970-25978
ISSN: 1094-4087
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Supporting Services Campusmanagement Science, Engineering and Technology

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