ITEM METADATA RECORD
Title: Nickel silicide formation using excimer laser annealing
Authors: Tous, Loic
Lerat, Jean-Francois
Emeraud, Thierry
Negru, R
Huet, K
Uruena De Castro, Angel
Aleman, Monica
Russell, Richard
John, Joachim
Poortmans, Jef
Mertens, Robert
Issue Date: 2012
Host Document: 2nd International Conference on Crystalline Silicon Photovoltaics - SiliconPV pages:503-509
Conference: 2nd International Conference on Crystalline Silicon Photovoltaics - SiliconPV location:Leuven Belgium date:03/05/2012
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
ESAT - ELECTA, Electrical Energy Computer Architectures

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