Title: Process Study and Characterization of VO2 Thin Films Synthesized by ALD Using TEMAV and O-3 Precursors
Authors: Premkumar, Peter Antony ×
Toeller, Michael
Radu, Iuliana
Adelmann, Christoph
Schaekers, Marc
Meersschaut, Johan
Conard, Thierry
Van Elshocht, Sven #
Issue Date: 2012
Publisher: Electrochemical Society, Inc.
Series Title: ECS Journal of Solid State Science and Technology vol:1 issue:4 pages:P169-P174
ISSN: 2162-8769
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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